This 5.0-mm-diameter bonded MEMS mirror is a micro-assembly of a monolithically fabricated actuator engine combined with a mirror to accommodate larger beams. Maximum tilt angle under point-to-point driving is -6° to 6° mechanical on each axis, while maximum tilt angle under resonant driving is -7° to 7° mechanical.
SPIE Photonics West booth number: 5660
To Learn More:
Contact:Mirrorcle Technologies
Headquarters: Richmond, CA
Product: 5.0-mm-diameter MEMS mirrors
Key Features: Accommodates larger beams
What Mirrorcle Technologies says:
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