Develops state-of-the-art nanofabrication processes, specializing in nanoimprint lithography. Our applications focus on the fabrication of a new class of fiber based photonic devices.
aBeam Technologies, LBNL, and Argonne National Laboratory researchers developed a technology to fabricate test patterns with a minimum linewidth down to 1.5 nm.
KEY CONTACTS
Keiko Munechika
Mgr Nanofabrication
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