Plasma-Therm, UCLA Cali Nanosystems Institute co-sponsor etching workshop
St. Petersburg, FL--Recently, semiconductor equipment supplier Plasma-Therm and the California NanoSystems Institute at UCLA co-sponsored a one-day technical workshop focused on advanced plasma processing to nearly 50 graduate students, postdocs, professors, and local engineers. All have backgrounds in electrical engineering, physics, chemistry, materials, and biosciences, and attended to learn about applying plasma etching to the fabrication of electronic, photonic, medical, and nanoscale structures.
Presentations progressed from fundamental vacuum science, plasma generation, and etching mechanisms to etch processes for deep silicon, III-V compound semiconductors, dielectric materials, and metals.
David Lishan, Plasma-Therm principal scientist, workshop organizer, and one of the instructors of the workshop, explains that the workshops are a setting to demonstrate the company's commitment to education. Teaching plasma etching fundamentals along with advanced practices allows users to more efficiently develop their fabrication processes, he says.
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