Piezo nanopositioning stages

The QNP2 series XY piezo positioning stages from Aerotech (Pittsburgh, PA) have a 50 × 50mm clear aperture with closed-loop travels up to 100 × 100µm (open-loop travels to 120 × 120µm). The stages employ a parallel-kinematic flexure and metrology design to ensure a high level of multi-axis accuracy. A patent-pending drive design minimizes yaw errors while maintaining an Abbe-compliant metrology system, and a capacitive sensor parallel-metrology design directly measures the output of the positioning carriage to enable 0.15nm resolution, 0.01% linearity, and 1nm bidirectional repeatability.

For more information, please visit www.aerotech.com.