Alexandria, Va. - Taiwanese process developers have been issued a U.S. patent for a laser patterning method for a fabricating disc stamper. The inventors were issued U.S. Patent No. 7,741,006 on June 22. It was assigned to Ming-Fang Hsu of Taipei, Tzuan-Ren Jeng of Hsinchu, Chin-Tien Yang of Taipei County, and Sheng-Li Chang of Hsinchu County, of the Industrial Technology Research Institute for "Disc Stamper Fabrication Laser Patterning Method."
According to the abstract released by the U.S. Patent & Trademark Office: "A method for fabricating a disc stamper is provided. First, a substrate is provided. Next, a layer of a coatable inorganic material is coated on the substrate, wherein the coatable inorganic material is an oxide, in which the chemical element constitution is more than one element selected from the group consisting of Te, Al, Zr, and Ti. Next, a laser beam is utilized to perform direct write on the layer of the coatable inorganic material to form a relief pattern. Thereafter, a metal layer is electroplated on the relief pattern. Next, the metal layer is separated from the relief pattern. The layer of the coatable inorganic material is utilized to form the relief pattern, so that it is more compatible to equipment apparatus and lower cost in contrast with sputtered PTM process."
The original application was filed on May 3, 2007.
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