The Trim 200 ion beam trimming system is used for high-precision surface trimming of wafers, without limitations on film and wafer materials. Film thickness homogeneity can be adjusted to the atom level of 0.1 nm. It offers subnanometer removal with a zero base etch function and no edge exclusion using an electrostatic chuck.
scia Systems
Chemnitz, Germany
www.scia-systems.com
Sponsored Recommendations
Sponsored Recommendations
Laser Assisted Wafer Slicing with 3DOF Motion Stages
Dec. 18, 2024
Free Space Optical Communication
Dec. 18, 2024
Voice your opinion!
Voice your opinion!