EUV light source features solid-state switching technology

    Jan. 28, 2025
    The EQS-10 EUV light source delivers up to 4x the energy per pulse with an operating frequency up to 5 kHz.
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    (Image credit: Energetiq)
    678682fafc3cde2af30e6504 Energetiq

    The EQS-10 electrodeless z-pinch extreme-ultraviolet (EUV) light source delivers up to 4x the energy per pulse with an operating frequency up to 5 kHz. Designed with solid-state switching technology, pre-ionization control enhances z-pinch efficiency and enables tunability for various gases. Applications include EUV metrology, resist development, and defect inspection.

    Energetiq

    Wilmington, MA

    www.energetiq.com

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