Silicon-on-sapphire ring resonators operate at a 5.5 μm wavelength

Feb. 1, 2011
Researchers at the University of Washington and Cornell University have created the first silicon-waveguide ring resonators for wavelengths between 5.4 and 5.6 μm.

Researchers at the University of Washington (Seattle, WA) and Cornell University (Ithaca, NY) have created the first silicon-waveguide ring resonators for wavelengths between 5.4 and 5.6 μm, opening up a new region for ring-resonator applications such as biosensing and modulation. The resonators, as well as ridge waveguides, were fabricated on a silicon-on-sapphire (SOS) substrate.

The chip was patterned using electron-beam lithography and contained various ridge waveguides and ring resonators. Waveguides with a height of 0.6 μm and varying widths were fabricated; as predicted, a 1.8 μm wide waveguide properly channeled the fundamental mode of linearly polarized light at a 5.5 μm wavelength. The measured loss of the ridge waveguide was 4.0 ± 0.7 dB/cm at laser powers ranging from 6 to 100 mW (with an insertion loss of 25 dB), indicating minimal nonlinear loss. The ring resonators had various radii and edge-to-edge spacings; a sample ring had a 40 μm radius and a 0.25 μm edge-to-edge spacing, and exhibited a cavity Q factor of 3000, a free spectral range of 29.7 nm, and an associated group index of 3.99. Optimizing the drop port should boost the Q closer to its theoretical value of 25,000. Contact Alexander Spott at [email protected].

About the Author

John Wallace | Senior Technical Editor (1998-2022)

John Wallace was with Laser Focus World for nearly 25 years, retiring in late June 2022. He obtained a bachelor's degree in mechanical engineering and physics at Rutgers University and a master's in optical engineering at the University of Rochester. Before becoming an editor, John worked as an engineer at RCA, Exxon, Eastman Kodak, and GCA Corporation.

Sponsored Recommendations

Brain Computer Interface (BCI) electrode manufacturing

Jan. 31, 2025
Learn how an industry-leading Brain Computer Interface Electrode (BCI) manufacturer used precision laser micromachining to produce high-density neural microelectrode arrays.

Electro-Optic Sensor and System Performance Verification with Motion Systems

Jan. 31, 2025
To learn how to use motion control equipment for electro-optic sensor testing, click here to read our whitepaper!

How nanopositioning helped achieve fusion ignition

Jan. 31, 2025
In December 2022, the Lawrence Livermore National Laboratory's National Ignition Facility (NIF) achieved fusion ignition. Learn how Aerotech nanopositioning contributed to this...

Nanometer Scale Industrial Automation for Optical Device Manufacturing

Jan. 31, 2025
In optical device manufacturing, choosing automation technologies at the R&D level that are also suitable for production environments is critical to bringing new devices to market...

Voice your opinion!

To join the conversation, and become an exclusive member of Laser Focus World, create an account today!