Optics

Thin-film head lithography

Dec. 1, 1997

The Model 1800 lithography tool is designed for manufacturers of thin-film heads in disk drives. The device provides first-order alignment to the magneto-resistive lead layer while maintaining resolution and throughput requirements for advanced thin-film-head rowbar production. The machine features a 28 ¥ 2.0-mm field size with 0.8-µm resolution capabilities.

Ultratech Stepper, San Jose, CA

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