The EVG 720 automated UV nanoimprint lithography (UV-NIL) system provides full-field lithography with an integrated soft stamp/template fabrication capability. Designed for photonics, LED, and BioMEMS production, it can print nanostructures as small as 40 nm in diameter over a large area in volume throughputs of >60 wafers/hr.
EV Group
St. Florian, Austria
www.evgroup.com
More Products
-----
Follow us on Twitter
Subscribe now to Laser Focus World magazine; it's free!
LFW Staff
Published since 1965, Laser Focus World—a brand and magazine for engineers, researchers, scientists, and technical professionals—provides comprehensive global coverage of optoelectronic technologies, applications, and markets. With 80,000+ qualified print subscribers in print and over a half-million annual visitors to our online content, we are the go-to source to access decision makers and stay in-the-know.