Software & Accessories

Low-profile fast rotation stage is designed for semiconductor wafer positioning

June 29, 2021

The RGA150 low-profile fast rotation stage has been specifically designed for semiconductor wafer positioning applications.

The RGA150 low-profile fast rotation stage has been specifically designed for semiconductor wafer positioning applications. With an aperture diameter of 90 mm and a profile of 60 mm, it offers accuracy of ± 0.001° (mapped), bidirectional repetition of ±0.0975 mdeg, minimum incremental motion of 0.01 mdeg, and a maximum speed of 300 rpm.

Newport (MKS Instruments)

Irvine, CA

newport.com

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