Low-profile rotary stages provide resolution to 0.0015 µrad

Nov. 2, 2021
The A-630 series includes A-634 and A-638 model direct drive rotary stages with 150 and 350 mm table diameters, respectively.

The A-630 series includes A-634 and A-638 model direct-drive rotary stages with 150 and 350 mm table diameters, respectively. They measure 60 mm tall, provide speed to 3000 degrees/sec., resolution to 0.0015 µrad, and respective flatness and eccentricity of 175 and 300 nm. For transmitted light applications, the large-aperture A-688 model is available.

PI (Physik Instrumente)

Auburn, MA

pi-usa.us

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