Hexapod provides high-integrity motion with nanometer precision

    May 12, 2024
    The Hybrid Hexapod system provides 6D motion for applications including optics, semiconductors, manufacturing, metrology, laser processing, and micromachining.
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    (Image credit: ALIO Industries)
    66390450b6ea0e00082392e4 Alio Industries

    The Hybrid Hexapod system provides 6D motion, integrating a tripod parallel kinematics structure for Z-plane and tip/tilt motion with a monolithic serial kinematic structure for XY motion and a rotary stage for continuous 360° yaw rotation, providing high-integrity motion with nanometer precision. Applications include optics, semiconductors, manufacturing, metrology, laser processing, and micromachining.

    ALIO Industries

    Arvada, CO

    www.alioindustries.com

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