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    MKS Instruments thermal management system available

    April 21, 2020
    The Series 49UL thermal management system for semiconductor, analytic, and advanced markets has improved heater diagnostics capability and UL and CE safety certifications.

    The Series 49UL thermal management system for semiconductor, analytic, and advanced markets has improved heater diagnostics capability and UL and CE safety certifications. With heater jackets made of polyimide or polytetrafluoroethylene, it provides high-temperature operation and uniformity while being lightweight and flexible. The controller uses the RS485 Modbus RTU communications protocol.

    MKS Instruments

    Andover, MA

    www.mksinst.com

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