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    PI vacuum stage features noncontact optical reference switch

    July 19, 2020
    The L-509 vacuum stage series is offered for three different vacuum levels up to 10-9 hPa with linear motion ranges of 26, 52, and 102 mm.
    Pi 5eed099f6b5ae

    The L-509 vacuum stage series is offered for three different vacuum levels up to 10-9 hPa with linear motion ranges of 26, 52, and 102 mm. Features include a precision-ground ball screw with 1 mm pitch, sub-micron resolution, repeatability up to 0.1 µm, and a noncontact optical reference switch with direction sensing in the middle of the travel range.

    PI (Physik Instrumente)

    Auburn, MA

    www.pi-usa.us

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