PI vacuum stage features noncontact optical reference switch

July 19, 2020

The L-509 vacuum stage series is offered for three different vacuum levels up to 10-9 hPa with linear motion ranges of 26, 52, and 102 mm.

The L-509 vacuum stage series is offered for three different vacuum levels up to 10-9 hPa with linear motion ranges of 26, 52, and 102 mm. Features include a precision-ground ball screw with 1 mm pitch, sub-micron resolution, repeatability up to 0.1 µm, and a noncontact optical reference switch with direction sensing in the middle of the travel range.

PI (Physik Instrumente)

Auburn, MA

www.pi-usa.us

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