Single-axis piezo stages from PI provide resolution of less than 0.1 nm

The PiHera P-620.1–P-629.1 piezo flexure nanopositioning stages feature X-Y travel to 1800 μm. The closed-loop, single-axis stages have absolute-measuring direct-metrology capacitance sensors, and provide resolution of <0.1 nm with positioning accuracy of 0.02%. They are driven by the company’s PICMA piezo ceramic actuators.
PI (Physik Instrumente)
Auburn, MA
www.pi-usa.us