RotoRing300 direct drive rotary tables provide superior angular positioning for front- and back-end semiconductor manufacturing equipment using latest generation 300 mm wafers...
Overhead XY gantries are built with precision ball screw actuators and are available in travel lengths from 100 to 600 mm and speed up to 100 mm/sec. with resolution of 5 µm.
The ACR-335UT direct drive rotary table adapts linear motor technology, coupled with precision bearings, to provide accurate handling of 300 mm semiconductor wafers.
Hollow shaft rotary actuators in four stage sizes with center apertures from 33 to 100 mm offer optimized load capacity, torque, speed, and resolution.
Precision motorized X-Y-rotary LSMAMLVT-RTHM combination positioning stages are designed for space-critical optical, semiconductor, laser, and vacuum applications.
AccuRing series direct-drive rotary stages feature up to 300 rpm continuous rotation, angular contact bearings, and a precision-machined mounting shaft to minimize wobble.
The LSMA-RTHM motorized XY rotary positioning stages are constructed from a lightweight machined aluminum alloy to provide high stiffness and long-term stability with linear ball...
The MLVS series vertical lift stages feature a wedge design that converts horizontal motion, generated by a ball screw drive, into true vertical elevation of the platform.
