Manufactures passive vibration isolation systems with active/automatic leveling to within +/- 10 microns, AIS-Active Isolation Systems with either 3 or 6 degrees of freedom and isolated tables.
Compared to mechanical positioning/vibration control methods, electro-pneumatic systems minimize work-surface deflection with short settling times and provide six degrees-of-freedom...
KEY CONTACTS
Bill Granchi
Sls Eng
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