Imaging spectrometer for VUV from McPherson measures vertical spatial profile
March 28, 2018
A imaging spectrometer for the vacuum ultraviolet (VUV) measures vertical spatial profile, in addition to dispersed wavelengths, to view plasma impurity emission lines from 300 to 3200 Å. Using an entrance slit width of 0.02 mm, users can achieve 15.3 pm spectral resolution FWHM. New spectrometers can be built for high vacuum (10-6 Torr) and ultra-high vacuum (10-10 Torr).
McPherson
Chelmsford, MA
Sponsored Recommendations
Sponsored Recommendations
Laser Assisted Wafer Slicing with 3DOF Motion Stages
Dec. 18, 2024
Free Space Optical Communication
Dec. 18, 2024
Voice your opinion!
Voice your opinion!